Tailored to Your Needs
The institute has more than 20,000 square feet of cleanroom and laboratory resources dedicated to the realization of a broad range of micro/nano systems. The institute provides services to external customers on many aspects of measurements and characterization needs, which are tailored to maximally meet customer needs or specifications.
Currently, the Institute offers measurement and characterization services in three main areas:
A modern energy-filtered Transmission Electron Microscope (120KV ZEISS LIBRA 120 TEM) and a Scanning Electron Microscope (AMRAY 1830 SEM) with energy dispersive spectrometry (EDS) are available for imaging a variety of specimens and performing elemental analysis.
A suite of surface metrology tools are available for characterizing a wide range of materials, micro- nanostructures, and devices. These tools include atomic force microscopes, stylus profiler, and interferometric profiler.
Thin Film Metrology
The optical measurement tools such as, spectroscopic ellipsometer and white-light reflectometer are available for measuring the layer thickness of transparent and semi-transparent thin film materials. These instruments are capable of measuring thickness of ultra thin films.
For more information contact us at: