511: Vacuum Science & Technology. 0-3-3. Fundamental and advanced practices of vacuum technology are treated. Ultra high vacuum is included as well as introductory material on thin films and plasma processes.

521: Fundamental Lithography Processes. 0-3-3. A graduate level course in the fundamentals of optical lithography and electron beam lithography.

531: Electronic Materials. 0-3-3. A graduate level course in electronic materials starting from the atomic theory of matter. Applications include the fundamentals of microelectronic and optoelectronic devices.

541: Thin Film Deposition & Etching Techniques. 0-3-3. Fundamentals of deposition and processing of thin films for microstructure and microelectronics. Applications include micromechanical and microelectronic devices.

551: Material Analysis & Microstructure. 0-3-3. A graduate level course in the characteristics of meterials based on modern instrumental techniques. Bulk and surface characteristics are included.

561: Micro & Nano Scale Measurements. 0-3-3. A graduate level course in measurements from the millimeter to the atomic scale. Applications include atomic manipulation and nanometer motion control.

641: Laser & Ion Beam Processing. 0-3-3. Direct methods for material processing and microstructure fabrication using laser beams or ion beams are presented. Applications include electronic devices and characterization of materials.