Equipment for Micro and Nano Fabrication, include:

  • Two dedicated X-ray beamlines at the CAMD facility: one white-light beamline equipped with Jenoptik scanner for exposures, and one planar mirror beamline for research
  • A 2500 square foot Clean Room facility (Class 100 with Class 10 lithography room)
  • Photoresist spinning, baking and development capabilities
  • Research Devices 1um resolution pattern generator.
  • Dual-side Mask Aligner (Electronic Vision)
  • Dual chamber Reactive Ion Etcher (Plasmas-Therm, Unaxis)
  • DC-RF Magnetron Sputter Deposition System (Uni-Film Technology)
  • Dual chamber Plasma Enhanced Chemical Vapor Deposition System (Plasma-Therm, Unaxis)
  • Low Pressure Chemical Vapor Deposition System (CVD Equipment Corp)
  • Inductively Coupled Plasma Etch System (Alcatel)
  • Electron Beam Evaporator (CHA Industries)
  • Wet chemical benches and associated acid and solvent baths
  • Vacuum Ovens (Heraeus Instruments)
  • Electroplating facility for Copper and Nickel deposition
  • Thermal Aluminum Evaporator (Denton Vacuum, DV-502A)
  • Hot-embossing Tool (Jenoptik Microtechnik)
  • Micro Reactive Ion Etcher (Technics Series 800)
  • Robotic Dipping System (Ultrathin Organic Film Technology)
  • Precitech Optimum 2000 computer controlled ultra-precision lathe
  • Diamond Dicing Saw for automated wafer dicing
  • Excimer laser for micromaching at 248 and 351 nm (ASX 750, MPB Technologies)

Equipment for Measurement and Characterization, include:

  • Transmission Electron Microscope
  • Scanning Electron Microscope
  • Confocal Microscope
  • X-ray Photoelectron Spectrometer (Physical Electronics 5802, Upgradeable to Scanning Auger Spectrometer)
  • White light Interferometric Roughness-Step-Tester Microscope (WYKO RST Plus)
  • White light Roughness-Step Tester (WYKO NT1000)
  • Stylus Profilometer (Tencor Alpha Step 500)
  • Film Thickness Measurement System (Zeiss-Olympus)
  • Atomic Force Microscope (Quesant Instruments)
  • Micro Inspection System (Optimus)
  • Olympus AHMT3 Vanox Optical Microscopes
  • Olmpus Provis Microscope
  • Electrical Probe Station (Keithley Instruments)
  • Micromanipulator (The Micromanipulator Co Inc.)
  • UV-Visible Spectrophotometer (Agilent Technologies)
  • Fourier Transform IR Spectrometer (Thermo Nicolet, Nexus 470)
  • Contact-Angle Measurement System (Data Physics, Future Digital Scientific Corp.)
  • Alternating Gradient Magnetometer (Princeton Measurement Corp)
  • Magnetoresistance measurement system (Oxford Instruments)
  • Fluorescence Spectrometer (Photon Technology International)
  • Zeta Potential Analyzer (Zeta Plus, Brookhaven Instruments Corp)
  • Gas Chromatograph System (Hewlett Packard 5890, Series II)
  • Rapid Thermal Annealing furnace
  • Annealing Tube furnace (ThermaCraft Inc.)
  • Hot Plates with magnetic Stirrer (DataPlate, Thermolyne, IKA werke)

Equipment for Biotechnology Research, include:

  • Dedicated 1200 sq ft facility with integrated instrumentation and tissue culture suites
  • Advanced ChemTech Apex 396 peptide synthesizer
  • JasCo J-810 Circular Dichroism System with temperature control and fluorescence accessories
  • MicroCal VP-DSC differential scanning calorimeter
  • Beckman Coulter P/ACE MDQ capillary electrophoresis instrument
  • Beckman Coulter HPLC instrument
  • Amersham Biosciences ÄKTAprime protein purification system + UV detection + chart recorder
  • Conventional chromatography
  • 40 mL, 75 mL, 450 mL stirred cells
  • Extensive glassware and plasticware
  • Autoclave
  • Ultrapure water
  • 2 Techne Touchgene Gradient thermal cyclers
  • 4 Labnet Power Station 300 power supplies + electrophoresis gear
  • Spectroline UV transilluminator + hood + digital camera
  • Mitsubishi P91D digital monochrome printer
  • SiliconGraphics Fuel workstation, 600 MHz, 100 GB HD, 2 GB RAM
  • 2 Dell Optiplex 240s, 1.8 GHz, 40 GB HD, 256/768 MB RAM
  • InsightII, CHARMm, Biopolymer, PSI-plot 7, Origin, MATLAB, Mathematica, AutoCAD14, Britannica 2002, Paint Shop Pro 7, CorelDRAW 9, Publisher2000, BusinessPlanPro2002, Microsoft Office
  • Unico 2100 UV/vis spectrophotometer
  • Labnet 211DS benchtop incubating shaker
  • Beckman refrigerated benchtop centrifuge
  • Spectrafuge 16M benchtop centrifuge
  • Labline Multi-blok heater
  • 2, 20, 200, 1000, and 5000 uL precision pipettors
  • Boekel Grant LB-600 circulating water bath
  • Scotsman flaked ice maker
  • VWR sliding door refrigerator
  • –80 ºC freezer

R&D Laboratory
Equipment