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Equipment for Micro and Nano Fabrication, include:
- Two dedicated X-ray beamlines at the CAMD facility: one white-light beamline equipped with Jenoptik scanner for exposures, and one planar mirror beamline for research
- A 2500 square foot Clean Room facility (Class 100 with Class 10 lithography room)
- Photoresist spinning, baking and development capabilities
- Research Devices 1um resolution pattern generator.
- Dual-side Mask Aligner (Electronic Vision)
- Dual chamber Reactive Ion Etcher (Plasmas-Therm, Unaxis)
- DC-RF Magnetron Sputter Deposition System (Uni-Film Technology)
- Dual chamber Plasma Enhanced Chemical Vapor Deposition System (Plasma-Therm, Unaxis)
- Low Pressure Chemical Vapor Deposition System (CVD Equipment Corp)
- Inductively Coupled Plasma Etch System (Alcatel)
- Electron Beam Evaporator (CHA Industries)
- Wet chemical benches and associated acid and solvent baths
- Vacuum Ovens (Heraeus Instruments)
- Electroplating facility for Copper and Nickel deposition
- Thermal Aluminum Evaporator (Denton Vacuum, DV-502A)
- Hot-embossing Tool (Jenoptik Microtechnik)
- Micro Reactive Ion Etcher (Technics Series 800)
- Robotic Dipping System (Ultrathin Organic Film Technology)
- Precitech Optimum 2000 computer controlled ultra-precision lathe
- Diamond Dicing Saw for automated wafer dicing
- Excimer laser for micromaching at 248 and 351 nm (ASX 750, MPB Technologies)
Equipment for Measurement and Characterization, include:
- Transmission Electron Microscope
- Scanning Electron Microscope
- Confocal Microscope
- X-ray Photoelectron Spectrometer (Physical Electronics 5802, Upgradeable to Scanning Auger Spectrometer)
- White light Interferometric Roughness-Step-Tester Microscope (WYKO RST Plus)
- White light Roughness-Step Tester (WYKO NT1000)
- Stylus Profilometer (Tencor Alpha Step 500)
- Film Thickness Measurement System (Zeiss-Olympus)
- Atomic Force Microscope (Quesant Instruments)
- Micro Inspection System (Optimus)
- Olympus AHMT3 Vanox Optical Microscopes
- Olmpus Provis Microscope
- Electrical Probe Station (Keithley Instruments)
- Micromanipulator (The Micromanipulator Co Inc.)
- UV-Visible Spectrophotometer (Agilent Technologies)
- Fourier Transform IR Spectrometer (Thermo Nicolet, Nexus 470)
- Contact-Angle Measurement System (Data Physics, Future Digital Scientific Corp.)
- Alternating Gradient Magnetometer (Princeton Measurement Corp)
- Magnetoresistance measurement system (Oxford Instruments)
- Fluorescence Spectrometer (Photon Technology International)
- Zeta Potential Analyzer (Zeta Plus, Brookhaven Instruments Corp)
- Gas Chromatograph System (Hewlett Packard 5890, Series II)
- Rapid Thermal Annealing furnace
- Annealing Tube furnace (ThermaCraft Inc.)
- Hot Plates with magnetic Stirrer (DataPlate, Thermolyne, IKA werke)
Equipment for Biotechnology Research, include:
- Dedicated 1200 sq ft facility with integrated instrumentation and tissue culture suites
- Advanced ChemTech Apex 396 peptide synthesizer
- JasCo J-810 Circular Dichroism System with temperature control and fluorescence accessories
- MicroCal VP-DSC differential scanning calorimeter
- Beckman Coulter P/ACE MDQ capillary electrophoresis instrument
- Beckman Coulter HPLC instrument
- Amersham Biosciences ÄKTAprime protein purification system + UV detection + chart recorder
- Conventional chromatography
- 40 mL, 75 mL, 450 mL stirred cells
- Extensive glassware and plasticware
- Autoclave
- Ultrapure water
- 2 Techne Touchgene Gradient thermal cyclers
- 4 Labnet Power Station 300 power supplies + electrophoresis gear
- Spectroline UV transilluminator + hood + digital camera
- Mitsubishi P91D digital monochrome printer
- SiliconGraphics Fuel workstation, 600 MHz, 100 GB HD, 2 GB RAM
- 2 Dell Optiplex 240s, 1.8 GHz, 40 GB HD, 256/768 MB RAM
- InsightII, CHARMm, Biopolymer, PSI-plot 7, Origin, MATLAB, Mathematica, AutoCAD14, Britannica 2002, Paint Shop Pro 7, CorelDRAW 9, Publisher2000, BusinessPlanPro2002, Microsoft Office
- Unico 2100 UV/vis spectrophotometer
- Labnet 211DS benchtop incubating shaker
- Beckman refrigerated benchtop centrifuge
- Spectrafuge 16M benchtop centrifuge
- Labline Multi-blok heater
- 2, 20, 200, 1000, and 5000 uL precision pipettors
- Boekel Grant LB-600 circulating water bath
- Scotsman flaked ice maker
- VWR sliding door refrigerator
- –80 ºC freezer
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