The IfM laboratory comprises approximately 20,000 square feet and is divided into three main areas: Lithography Laboratory (x-ray and deep uv, silicon processes, clean rooms), Micrometrology and Testing Laboratory (SEM, AFM/STM, RST, etc), and Complementary Micromachining Processes Laboratory (diamond, microdrilling/milling/EDM, laser, etc).

The laboratory spaces are environmentally controlled as is required for the various processes and equipment. Distributed throughout the laboratory facility are offices and smaller laboratories where guest researchers from industry or academia may reside. Additionally, there is a dedicated area for teaching and training of undergraduate and graduate students, industrial participants, visiting researchers, and IfM faculty and staff.

In addition to the central research facility, the IfM owns and operates two x-ray transport lines at CAMD-LSU Baton Rouge for deep x-ray lithography. The IfM has a technology transfer center in nearby Shreveport, Louisiana to help transfer industrial and process technology to the private sector.