Microfabrication Process Simulation

This is a 3 day course on the principles and practice of 2-D process simulation with the aid of the process simulator TSUPREM-4/Sentaurus Process from Synopsys, Inc. The course is intended for individuals who do not have extensive background and expertise in TCAD, and seek to receive formal and systematic training in the principles and practice of process simulation, as necessary for modern industrial applications. The course consists of lectures and laboratory sessions, with emphasis on participants gaining "hands-on" experience in conducting 2-D process simulation. The topics covered include, introduction to TCAD, principal elements of process simulation, process models (e.g. dopant diffusion, ion implantation, thermal oxidation, material etching and deposition), process simulation examples and class exercises. For information about dates of offering, tuition, and enrollment procedure please contact the IfM Modeling and Simulation Laboratory.

Microelectronic Device Simulation

This is a 3 day course on the principles and practice of 2-D device simulation with the aid of the device simulator MEDICI/Sentaurus Device from Synopsys, Inc. The course is intended for individuals who do not have extensive background and expertise in TCAD, and seek to receive formal and systematic training in the principles and practice of device simulation, as necessary for modern industrial applications. The course consists of lectures and laboratory sessions, with emphasis on participants gaining "hands-on" experience in conducting 2-D device simulation. The topics covered include, introduction to TCAD, principal elements of device simulation, device physics and models, numerical methods, device simulation examples and class exercises. For information about dates of offering, tuition, and enrollment procedure please contact the IfM Modeling and Simulation Laboratory.

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