The TCAD research programs conducted are centered on the development and application of advanced models for microfabrication process and microelectronic device simulation. There is emphasis on 2-D and 3-D modeling and simulation of processes and devices, as necessary for ULSI applications. The research programs are in direct response to solving specific industrial needs related to technology modeling and simulation. These programs are sponsored by industry. Recent sponsors include, SEMATECH, Texas Instruments Incorporated, and Technology Modeling Associates, Inc.