RESEARCH ENTERPRISE

HITACHI S-4800 Field-Emission Scanning Electron Microscope

The Hitachi S-4800 cold-cathode field-emission scanning electron microscope (FE-SEM) is a very advanced imaging system that can provide a resolution on the order of ~ 1nm at 15KV of beam energy. This FE-SEM allows imaging metallic, inorganic, organic and biological specimens with minimum damage to soft samples. The energy dispersive X-ray spectrometer (EDS) coupled with this FE-SEM provides the capability to analyze materials by determining the elemental composition and mapping specimen surfaces. A YAG backscattered electron (BSE) detector is available to capture contrast-enhanced images of multi-phase materials. Silicon wafer and other substrate materials up to 4” in diameter can be loaded and imaged. Only dry samples are allowed for imaging in this system.

Capabilities:
• High-resolution imaging of micro and nanostructured solid samples

• X-ray microanalysis (EDAX Genesis 400)

• Backscattered electron imaging using YAG detector

• Low KV (0.5 – 5.0KV) imaging and high KV (5.0 – 30.0 KV) imaging

• Wafers up to 4” diameter can be imaged

• Measurement of particle size and critical dimensions 


Additional Resources:

Example Images
Secondary Electron (SE) Images

Contact Person:  Davis Bailey Email: dbailey@latech.edu Tel: 318-257-5111