INSTITUTE FOR MICROMANUFACTURING

The institute has more than 20,000 square feet of cleanroom and laboratory resources dedicated to the realization of a broad range of micro/nanosystems. The institute provides services to external customers on many aspects of measurements and characterization needs, which are tailored to maximally meet customer needs or specifications. Currently, the Institute offers measurement and characterization services in three main areas:

• Electron Microscopy Scanning Electron Microscope (Hitachi S4800 FE-SEM) with energy dispersive spectroscopy (EDS) for imaging materials in SE, BSE, and STEM modes including performing chemical analyses and elemental mapping.
• Surface Metrology A suite of surface metrology tools are available for characterizing a wide range of materials, micro-nanostructures, and devices. These tools include atomic force microscopes, stylus profiler, and interferometric profiler.
• Thin Film Metrology The optical measurement tools such as, spectroscopic ellipsometer and white-light reflectometer are available for measuring the layer thickness of transparent and semi-transparent thin film materials. These instruments are capable of measuring the thickness of ultra-thin films. Metrology tools are available for characterizing a wide range of materials, micro-nanostructures, and devices. These tools include atomic force microscopes, stylus profiler, and interferometric profiler.